Nano-graphitization in amorphous carbon films via electron beam irradiation and the iron implantation

Eiji Iwamura, Tatsuhiko Aizawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)


Nano-graphitization from amorphous carbon state is assisted by the electron beam irradiation. An inter-columnar region in the amorphous carbon films with low atomic and electron densities is controlled to have a graphitic structure by relatively low dose electron beam irradiation. This amorphous carbon - beam interaction generates a new type of carbon hybrids where the graphitic inter-columnar network is embedded into amorphous carbon columns. This hybrid film has an exotic mechanical and tribological response: extraordinary reversible deformability up to 8-10 % in normal strain, high wearing resistance and low friction at high normal pressure. A combination of iron-ion implantation with this electron irradiation provides us the other method of nano-graphitization process. An amorphous carbon film including the implanted iron atoms is chemically modified to have a columnar graphitic structure by the electron beam irradiation. In this post-implantation electron beam irradiation, the basic graphitic units with 1-2 nm in size are controlled to align vertically along the film thickness. This type of nano-graphitization has a strong dependency on the iron doses before electron beam irradiation. The above two types of nano-graphitization provides us a new tool to explore the functionalized structural thin films in application.

Original languageEnglish
Title of host publicationSelf Assembly of Nanostructures Aided by Ion- or Photon-Beam Irradiation
Subtitle of host publicationFundamentals and Applications
Number of pages7
Publication statusPublished - 2007 Dec 1
Event2006 MRS Fall Meeting - Boston, MA, United States
Duration: 2006 Nov 272006 Nov 30

Publication series

NameMaterials Research Society Symposium Proceedings
ISSN (Print)0272-9172


Other2006 MRS Fall Meeting
Country/TerritoryUnited States
CityBoston, MA

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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