Nanodot and nanorod formation in electron-beam-induced deposition using iron carbonyl

Masayuki Shimojo; Wei Zhang; Masaki Takeguchi; Miyoko Tanaka; Kazutaka Mitsuishi; Kazuo Furuya

doi:10.1143/JJAP.44.5651

Nanodot and nanorod formation in electron-beam-induced deposition using iron carbonyl

Masayuki Shimojo, Wei Zhang, Masaki Takeguchi, Miyoko Tanaka, Kazutaka Mitsuishi, Kazuo Furuya

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

Electron-beam-induced deposition is a promising technique for producing position-controlled nanometer-sized structures without using masks. In this study, electron-beam-induced deposition was carried out using iron carbonyl, and nanometer-sized dots and freestanding rods were fabricated. The nanostructures were characterized by scanning and transmission electron microscopy. The size of the nanodots as a function of beam irradiation time, and the width of the freestanding rods as a function of beam scan speed are reported. Nanocrystal formation under an area scan is also reported.

Original language	English
Pages (from-to)	5651-5653
Number of pages	3
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	44
Issue number	7 B
DOIs	https://doi.org/10.1143/JJAP.44.5651
Publication status	Published - 2005 Jul 26
Externally published	Yes

Keywords

Electron-beam-induced deposition
Iron carbide
Iron pentacarbonyl
Nanofabrication
Scan speed

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

Access to Document

10.1143/JJAP.44.5651

Cite this

@article{d585fef13a0d4ceaba6cdfedcdb04823,

title = "Nanodot and nanorod formation in electron-beam-induced deposition using iron carbonyl",

abstract = "Electron-beam-induced deposition is a promising technique for producing position-controlled nanometer-sized structures without using masks. In this study, electron-beam-induced deposition was carried out using iron carbonyl, and nanometer-sized dots and freestanding rods were fabricated. The nanostructures were characterized by scanning and transmission electron microscopy. The size of the nanodots as a function of beam irradiation time, and the width of the freestanding rods as a function of beam scan speed are reported. Nanocrystal formation under an area scan is also reported.",

keywords = "Electron-beam-induced deposition, Iron carbide, Iron pentacarbonyl, Nanofabrication, Scan speed",

author = "Masayuki Shimojo and Wei Zhang and Masaki Takeguchi and Miyoko Tanaka and Kazutaka Mitsuishi and Kazuo Furuya",

year = "2005",

month = jul,

day = "26",

doi = "10.1143/JJAP.44.5651",

language = "English",

volume = "44",

pages = "5651--5653",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

number = "7 B",

}

TY - JOUR

T1 - Nanodot and nanorod formation in electron-beam-induced deposition using iron carbonyl

AU - Shimojo, Masayuki

AU - Zhang, Wei

AU - Takeguchi, Masaki

AU - Tanaka, Miyoko

AU - Mitsuishi, Kazutaka

AU - Furuya, Kazuo

PY - 2005/7/26

Y1 - 2005/7/26

N2 - Electron-beam-induced deposition is a promising technique for producing position-controlled nanometer-sized structures without using masks. In this study, electron-beam-induced deposition was carried out using iron carbonyl, and nanometer-sized dots and freestanding rods were fabricated. The nanostructures were characterized by scanning and transmission electron microscopy. The size of the nanodots as a function of beam irradiation time, and the width of the freestanding rods as a function of beam scan speed are reported. Nanocrystal formation under an area scan is also reported.

AB - Electron-beam-induced deposition is a promising technique for producing position-controlled nanometer-sized structures without using masks. In this study, electron-beam-induced deposition was carried out using iron carbonyl, and nanometer-sized dots and freestanding rods were fabricated. The nanostructures were characterized by scanning and transmission electron microscopy. The size of the nanodots as a function of beam irradiation time, and the width of the freestanding rods as a function of beam scan speed are reported. Nanocrystal formation under an area scan is also reported.

KW - Electron-beam-induced deposition

KW - Iron carbide

KW - Iron pentacarbonyl

KW - Nanofabrication

KW - Scan speed

UR - http://www.scopus.com/inward/record.url?scp=31844453620&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=31844453620&partnerID=8YFLogxK

U2 - 10.1143/JJAP.44.5651

DO - 10.1143/JJAP.44.5651

M3 - Article

AN - SCOPUS:31844453620

SN - 0021-4922

VL - 44

SP - 5651

EP - 5653

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

IS - 7 B

ER -

Nanodot and nanorod formation in electron-beam-induced deposition using iron carbonyl

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this