| Original language | English |
|---|---|
| Pages (from-to) | 28 |
| Journal | Default journal |
| Publication status | Published - 2004 Nov 1 |
Nanofabrication using electron-beam induced deposition combined with low energy ion milling
K. Mitsuishi, M. Shimojo, M. Tanaka, M. Takeguchi., K. Furuya
Research output: Contribution to journal › Article › peer-review