Nanofabrication using electron beam induced deposition technique

M. Shimojo, M. Shimojo;K.Mitsuishi;M.Takeguchi;M.Tanaka;K. Furuya

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	209-230
Journal	Encyclopedia of Nanoscience and Nanotechnology
Volume	17
Publication status	Published - 2011 Dec 1

Cite this

@article{07ddaa579b574c1781c800127b2b7dd0,

title = "Nanofabrication using electron beam induced deposition technique",

author = "M. Shimojo and Furuya, {M. Shimojo;K.Mitsuishi;M.Takeguchi;M.Tanaka;K.}",

year = "2011",

month = dec,

day = "1",

language = "English",

volume = "17",

pages = "209--230",

journal = "Encyclopedia of Nanoscience and Nanotechnology",

}