Nanostructure fabrication by electron beam induced deposition with metal carbonyl precursor and water vapor

M. Takeguchi, M. Shimojo, K. Furuya

Research output: Contribution to journal › Article › peer-review

Cite this

@article{c0101abb6d274119822ee6be2bee7f8a,

title = "Nanostructure fabrication by electron beam induced deposition with metal carbonyl precursor and water vapor",

author = "M. Takeguchi and M. Shimojo and K. Furuya",

year = "2007",

month = jan,

day = "1",

language = "English",

volume = "46",

pages = "6183--6186",

journal = "Jpn. J. Appl. Phys.",

}