Nanostructures fabricated by electron beam induced chemical vapor deposition

M. Takeguchi, M. Shimojo, K. Mitsuishi, M. Tanaka, K. Furuya

Research output: Contribution to journalConference articlepeer-review

9 Citations (Scopus)


Electron beam induced chemical vapor deposition (EBICVD) with tungsten and iron carbonyl gases, W(CO)6 and Fe(CO)5, was attempted to fabricate nanostructures. In case of the deposits from W(CO)6 gas, the structure was a mixture of nanocrystals and amorphous phases and no change was seen after a post-deposition heating treatment. On the other hand, the deposits from Fe(CO)5 gas were composed of amorphous iron surrounded by Fe oxide nanocrystals, and heating at about 600 °C resulted in the formation of crystalline Fe carbide and alpha-Fe phases. Thus, it was demonstrated that EBICVD with Fe(CO)5 gas followed by a heating treatment can be used practically to fabricate nanostructures of magnetic materials.

Original languageEnglish
Pages (from-to)255-264
Number of pages10
JournalSuperlattices and Microstructures
Issue number1-3
Publication statusPublished - 2004 Jul
Externally publishedYes
EventEuropean Materials Research Society 2004 - Strasbourg, France
Duration: 2004 May 242004 May 28

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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