NOVEL FULLY SELF-ALIGNED CLOSELY-SPACED-ELECTRODE HBT FOR SSI LOGIC FAMILY APPLICATIONS.

The design consideration, fabrication process, and performances of small-scale integrated (SSI) logic circuits implemented using recently developed self-aligned AlGaAs/GaAs heterojunction bipolar transistors (HBTs) are presented. The logic circuits include an inverter, OR/NOR, NAND/OR, exclusive-OR/NOR, and flip-flops constructed using current-mode logic (CML) gates. Each IC consumes about 30 mW of dc power for a successful operation with a chip yield higher than 50%. Preliminary experimental results with input frequencies higher than 1 GHz indicate capability of these circuits for GHz class operation. SPICE-F simulation shows potential for proper operation with clock/input frequencies exceeding 4 GHz.