Observation of quill effect induced by distortion of spatial beam profile

Shigeki Matsuo; Kei Enjo Yoshifumi Umeda; Shuichi Hashimoto

doi:10.1051/matecconf/20130801006

Observation of quill effect induced by distortion of spatial beam profile

Shigeki Matsuo, Kei Enjo Yoshifumi Umeda, Shuichi Hashimoto

Research output: Contribution to journal › Conference article › peer-review

Abstract

Femtosecond laser modification was carried out for silica substrates using spatially distorted pulses. Modified lines were inscribed in the alternative scanning directions. Etching of the sample revealed significant difference in etching rate, representing Quill effect. Also, the etching rates were affected by the distortion of the spatial beam profile. These results suggest the possibility to control the characteristics of the modified region by controlling the beam profile.

Original language	English
Article number	01006
Journal	MATEC Web of Conferences
Volume	8
DOIs	https://doi.org/10.1051/matecconf/20130801006
Publication status	Published - 2013
Externally published	Yes
Event	Workshop on Progress in Ultrafast Laser Modifications of Materials, 2013 - Cargese, France Duration: 2013 Apr 14 → 2013 Apr 19

ASJC Scopus subject areas

Chemistry(all)
Materials Science(all)
Engineering(all)

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10.1051/matecconf/20130801006

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title = "Observation of quill effect induced by distortion of spatial beam profile",

abstract = "Femtosecond laser modification was carried out for silica substrates using spatially distorted pulses. Modified lines were inscribed in the alternative scanning directions. Etching of the sample revealed significant difference in etching rate, representing Quill effect. Also, the etching rates were affected by the distortion of the spatial beam profile. These results suggest the possibility to control the characteristics of the modified region by controlling the beam profile.",

author = "Shigeki Matsuo and Umeda, {Kei Enjo Yoshifumi} and Shuichi Hashimoto",

year = "2013",

doi = "10.1051/matecconf/20130801006",

language = "English",

volume = "8",

journal = "MATEC Web of Conferences",

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note = "Workshop on Progress in Ultrafast Laser Modifications of Materials, 2013 ; Conference date: 14-04-2013 Through 19-04-2013",

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T1 - Observation of quill effect induced by distortion of spatial beam profile

AU - Matsuo, Shigeki

AU - Umeda, Kei Enjo Yoshifumi

AU - Hashimoto, Shuichi

PY - 2013

Y1 - 2013

N2 - Femtosecond laser modification was carried out for silica substrates using spatially distorted pulses. Modified lines were inscribed in the alternative scanning directions. Etching of the sample revealed significant difference in etching rate, representing Quill effect. Also, the etching rates were affected by the distortion of the spatial beam profile. These results suggest the possibility to control the characteristics of the modified region by controlling the beam profile.

AB - Femtosecond laser modification was carried out for silica substrates using spatially distorted pulses. Modified lines were inscribed in the alternative scanning directions. Etching of the sample revealed significant difference in etching rate, representing Quill effect. Also, the etching rates were affected by the distortion of the spatial beam profile. These results suggest the possibility to control the characteristics of the modified region by controlling the beam profile.

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DO - 10.1051/matecconf/20130801006

M3 - Conference article

AN - SCOPUS:84903129404

SN - 2261-236X

VL - 8

JO - MATEC Web of Conferences

JF - MATEC Web of Conferences

M1 - 01006

T2 - Workshop on Progress in Ultrafast Laser Modifications of Materials, 2013

Y2 - 14 April 2013 through 19 April 2013

ER -

Observation of quill effect induced by distortion of spatial beam profile

Abstract

ASJC Scopus subject areas

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