TY - JOUR
T1 - Observation of the creation and annihilation of local current paths in HfO2 thin films on pt by ultrahigh-vacuum conductive atomic force microscopy
T2 - Evidence of oxygen spill over during the forming process
AU - Sasaki, Naotaka
AU - Kita, Koji
AU - Toriumi, Akira
AU - Kyuno, Kentaro
PY - 2009/6
Y1 - 2009/6
N2 - By direct observation using ultrahigh-vacuum conductive atomic force microscopy, we find the reversible creation and annihilation of individual local current paths in HfO2 thin films on Pt. Experimental evidence of oxygen ion diffusion due to an electric field is obtained.
AB - By direct observation using ultrahigh-vacuum conductive atomic force microscopy, we find the reversible creation and annihilation of individual local current paths in HfO2 thin films on Pt. Experimental evidence of oxygen ion diffusion due to an electric field is obtained.
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U2 - 10.1143/JJAP.48.060202
DO - 10.1143/JJAP.48.060202
M3 - Article
AN - SCOPUS:68649119377
SN - 0021-4922
VL - 48
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 6
M1 - 060202
ER -