TY - GEN
T1 - On-chip force sensing by magnetically driven microtool for measurement of stimulant property of p. Laevis
AU - Kawahara, Tomohiro
AU - Sugita, Masakuni
AU - Hagiwara, Masaya
AU - Yamanishi, Yoko
AU - Arai, Fumihito
AU - Kawano, Hiroyuki
AU - Shihira-Ishikawa, Ikuko
AU - Miyawaki, Atsushi
PY - 2011/12/1
Y1 - 2011/12/1
N2 - In this paper, we newly propose an on-chip force sensing by using a magnetically driven microtool (MMT) equipped with a frame structure for measurement of stimulant property of Pleurosira laevis. The design and fabrication of the force sensing structure with a displacement magnification mechanism based on beam deformation is discussed. Through the basic experiments, the advantages of the proposed layer fabrication technique and the performance of the force sensor are confirmed. The basic characteristics of P. laevis are also confirmed by using the developed MMT.
AB - In this paper, we newly propose an on-chip force sensing by using a magnetically driven microtool (MMT) equipped with a frame structure for measurement of stimulant property of Pleurosira laevis. The design and fabrication of the force sensing structure with a displacement magnification mechanism based on beam deformation is discussed. Through the basic experiments, the advantages of the proposed layer fabrication technique and the performance of the force sensor are confirmed. The basic characteristics of P. laevis are also confirmed by using the developed MMT.
UR - http://www.scopus.com/inward/record.url?scp=84860494295&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84860494295&partnerID=8YFLogxK
U2 - 10.1109/ICRA.2011.5980174
DO - 10.1109/ICRA.2011.5980174
M3 - Conference contribution
AN - SCOPUS:84860494295
SN - 9781612843865
T3 - Proceedings - IEEE International Conference on Robotics and Automation
SP - 273
EP - 278
BT - 2011 IEEE International Conference on Robotics and Automation, ICRA 2011
T2 - 2011 IEEE International Conference on Robotics and Automation, ICRA 2011
Y2 - 9 May 2011 through 13 May 2011
ER -