TY - GEN
T1 - On-chip particle-laden droplet dispensing by disposable inkjet system
AU - Mizunuma, Takehito
AU - Yamanishi, Yoko
AU - Sakuma, Shinya
AU - Maruyama, Hisataka
AU - Arai, Fumihito
PY - 2009
Y1 - 2009
N2 - We succeeded in dispensing micro-droplet by a disposable on-chip inkjet mechanism. Novelty of this paper is summarized as follows. (1) We employed a glass plate bonded Poly-dimethylsiloxane (PDMS) membrane to obtain leaf spring structure whose spring coefficient is 14 times of the conventional PDMS membrane. As a result, we succeeded in dispensing droplets continuously (up to 10 Hz) by vibrating the membrane using the multilayers piezoelectric actuator attached to the PDMS disposable chip. (2) The nozzle for droplet dispensing was fabricated by thick photoresist (SU-8) to obtain the hydrophobic surface which prevents any undesired satellite droplets produced. Consequently the accuracy of position of the droplet dispensing was achieved ± 5 μm. The size of the droplet produced from the disposable nozzle (diameter = 100 μm) was in the range of 95-105 μm at the applied voltage of 105 V.
AB - We succeeded in dispensing micro-droplet by a disposable on-chip inkjet mechanism. Novelty of this paper is summarized as follows. (1) We employed a glass plate bonded Poly-dimethylsiloxane (PDMS) membrane to obtain leaf spring structure whose spring coefficient is 14 times of the conventional PDMS membrane. As a result, we succeeded in dispensing droplets continuously (up to 10 Hz) by vibrating the membrane using the multilayers piezoelectric actuator attached to the PDMS disposable chip. (2) The nozzle for droplet dispensing was fabricated by thick photoresist (SU-8) to obtain the hydrophobic surface which prevents any undesired satellite droplets produced. Consequently the accuracy of position of the droplet dispensing was achieved ± 5 μm. The size of the droplet produced from the disposable nozzle (diameter = 100 μm) was in the range of 95-105 μm at the applied voltage of 105 V.
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U2 - 10.1109/MHS.2009.5351878
DO - 10.1109/MHS.2009.5351878
M3 - Conference contribution
AN - SCOPUS:77950936649
SN - 9781424450954
T3 - 20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science
SP - 344
EP - 349
BT - 20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science
T2 - 20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science
Y2 - 8 November 2009 through 11 November 2009
ER -