On-chip thermoelectric module comprised of oxide thin film legs

S. Saini, P. Mele, K. Miyazaki, A. Tiwari

Research output: Contribution to journalArticlepeer-review

18 Citations (Scopus)


On-chip thermoelectric thin film modules containing 5 legs of n-type (Al0.02Zn0.98O) and 5 legs of p-type (Ca3Co4O9) were fabricated on Al2O3, SrTiO3 single crystal, and fused silica substrates by pulsed laser deposition technique. Performance of modules was evaluated using ad hoc customized system where the module was set vertically for temperature gradient. The maximum output power (Pmax) was obtained on Al2O3 (0 0 0 1) single crystal substrate with temperature difference (ΔT)=230°C (Th = 300 °C): Pmax = 29.9 pW. The value of maximum output power increases with increase of temperature difference (ΔT). These results are encouraging for the practical applications of thermoelectric oxide thin films.

Original languageEnglish
Pages (from-to)251-257
Number of pages7
JournalEnergy Conversion and Management
Publication statusPublished - 2016 Apr 15
Externally publishedYes


  • On-chip module
  • Oxide thin film
  • Pulsed laser deposition
  • Thermoelectric
  • Thermoelectric module

ASJC Scopus subject areas

  • Renewable Energy, Sustainability and the Environment
  • Nuclear Energy and Engineering
  • Fuel Technology
  • Energy Engineering and Power Technology


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