Optical propagation loss increase of (Gdbi)3fe5o12 films caused by sputter etching

Hideki Yokoi; Tetsuya Mizumoto; Yoshiyuki Naito

doi:10.1143/JJAP.34.4817

Optical propagation loss increase of (Gdbi)₃fe₅o₁₂ films caused by sputter etching

Hideki Yokoi, Tetsuya Mizumoto, Yoshiyuki Naito

Research output: Contribution to journal › Comment/debate › peer-review

1 Citation (Scopus)

Abstract

Rib waveguides, which are made of magnetic garnet films of composition (GdBi)₃Fe₅O₁₂ and are fabricated by Ar sputter etching, have large optical propagation loss when Ti is used as the etch mask. The loss increase is alleviated by using a SiO₂ mask. X-ray photoelectron spectroscopy analysis reveals that Fe chemical shift due to Ar⁺ ion bombardment causes increase in the optical absorption loss, and hence the propagation loss.

Original language	English
Pages (from-to)	4817-4818
Number of pages	2
Journal	Japanese Journal of Applied Physics
Volume	34
Issue number	9R
DOIs	https://doi.org/10.1143/JJAP.34.4817
Publication status	Published - 1995 Sept
Externally published	Yes

Keywords

(GdBi)FeO
Optical absorption loss
Rib waveguide
Sputter etching
X-ray photoelectron spectroscopy

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

Access to Document

10.1143/JJAP.34.4817

Cite this

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title = "Optical propagation loss increase of (Gdbi)3fe5o12 films caused by sputter etching",

abstract = "Rib waveguides, which are made of magnetic garnet films of composition (GdBi)3Fe5O12 and are fabricated by Ar sputter etching, have large optical propagation loss when Ti is used as the etch mask. The loss increase is alleviated by using a SiO2 mask. X-ray photoelectron spectroscopy analysis reveals that Fe chemical shift due to Ar+ ion bombardment causes increase in the optical absorption loss, and hence the propagation loss.",

keywords = "(GdBi)FeO, Optical absorption loss, Rib waveguide, Sputter etching, X-ray photoelectron spectroscopy",

author = "Hideki Yokoi and Tetsuya Mizumoto and Yoshiyuki Naito",

year = "1995",

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language = "English",

volume = "34",

pages = "4817--4818",

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T1 - Optical propagation loss increase of (Gdbi)3fe5o12 films caused by sputter etching

AU - Yokoi, Hideki

AU - Mizumoto, Tetsuya

AU - Naito, Yoshiyuki

PY - 1995/9

Y1 - 1995/9

N2 - Rib waveguides, which are made of magnetic garnet films of composition (GdBi)3Fe5O12 and are fabricated by Ar sputter etching, have large optical propagation loss when Ti is used as the etch mask. The loss increase is alleviated by using a SiO2 mask. X-ray photoelectron spectroscopy analysis reveals that Fe chemical shift due to Ar+ ion bombardment causes increase in the optical absorption loss, and hence the propagation loss.

AB - Rib waveguides, which are made of magnetic garnet films of composition (GdBi)3Fe5O12 and are fabricated by Ar sputter etching, have large optical propagation loss when Ti is used as the etch mask. The loss increase is alleviated by using a SiO2 mask. X-ray photoelectron spectroscopy analysis reveals that Fe chemical shift due to Ar+ ion bombardment causes increase in the optical absorption loss, and hence the propagation loss.

KW - (GdBi)FeO

KW - Optical absorption loss

KW - Rib waveguide

KW - Sputter etching

KW - X-ray photoelectron spectroscopy

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EP - 4818

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

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