Optical Properties of Fluorinated Silicon Oxide and Organic Spin-on-Glass Films fou Thin-Film Optical Waveguides.

T.Homma T.Homma, M.Sakamoto M.Sakamoto, Y.Ariyama Y.Ariyama, S.Kanegae S.Kanegae, H.Kondo H.Kondo, M.Itoh M.Itoh, M.Yamaguchi M.Yamaguchi, H.Takahashi H.Takahashi, Tetsuya Homma

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)
Original languageEnglish
Pages (from-to)1141-1144
JournalJournal of The Eectrochemical Society
Volume147
Publication statusPublished - 2000 Mar 1

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