PBW (Proton Beam Writer) application for EcoDesign of electronics

Hidetaka Hayashi, Hiroyuki Nishikawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution


The subject of this research is to find a process applicable to recycling FPC system adding extra functionality in the polymeric material without photo sensitive agent. We chose PBW (Proton Beam Writer) as an option. The potential impact by charge can modify electronic state and chemical bonding. Acceleration voltage and specific charge limit the depth of material modification. Proton is preferred to save acceleration voltage but the potential impact is low. We have investigated hydrogen molecular ions (H2+ and H3+) to compromise penetration depth and improve potential impact inside the material. These molecular ions are not easy to accelerate but have two or triple fold charges therefore they are especially suited to make big shallow structures. We can efficiently make the GTH (Groove and Thru-hole) structure combining them with Proton for deep structure.

Original languageEnglish
Title of host publication2016 Electronics Goes Green 2016+, EGG 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781509052080
Publication statusPublished - 2017 Jan 23
Event2016 Electronics Goes Green 2016+, EGG 2016 - Berlin, Germany
Duration: 2016 Sept 62016 Sept 9


Other2016 Electronics Goes Green 2016+, EGG 2016

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Renewable Energy, Sustainability and the Environment
  • Waste Management and Disposal
  • Electronic, Optical and Magnetic Materials


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