PBW (Proton Beam Writer) application for EcoDesign of electronics

Hidetaka Hayashi; Hiroyuki Nishikawa

doi:10.1109/EGG.2016.7829876

PBW (Proton Beam Writer) application for EcoDesign of electronics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The subject of this research is to find a process applicable to recycling FPC system adding extra functionality in the polymeric material without photo sensitive agent. We chose PBW (Proton Beam Writer) as an option. The potential impact by charge can modify electronic state and chemical bonding. Acceleration voltage and specific charge limit the depth of material modification. Proton is preferred to save acceleration voltage but the potential impact is low. We have investigated hydrogen molecular ions (H₂⁺ and H₃⁺) to compromise penetration depth and improve potential impact inside the material. These molecular ions are not easy to accelerate but have two or triple fold charges therefore they are especially suited to make big shallow structures. We can efficiently make the GTH (Groove and Thru-hole) structure combining them with Proton for deep structure.

Original language	English
Title of host publication	2016 Electronics Goes Green 2016+, EGG 2016
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781509052080
DOIs	https://doi.org/10.1109/EGG.2016.7829876
Publication status	Published - 2017 Jan 23
Event	2016 Electronics Goes Green 2016+, EGG 2016 - Berlin, Germany Duration: 2016 Sept 6 → 2016 Sept 9

Other

Other	2016 Electronics Goes Green 2016+, EGG 2016
Country/Territory	Germany
City	Berlin
Period	16/9/6 → 16/9/9

ASJC Scopus subject areas

Electrical and Electronic Engineering
Renewable Energy, Sustainability and the Environment
Waste Management and Disposal
Electronic, Optical and Magnetic Materials

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10.1109/EGG.2016.7829876

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title = "PBW (Proton Beam Writer) application for EcoDesign of electronics",

abstract = "The subject of this research is to find a process applicable to recycling FPC system adding extra functionality in the polymeric material without photo sensitive agent. We chose PBW (Proton Beam Writer) as an option. The potential impact by charge can modify electronic state and chemical bonding. Acceleration voltage and specific charge limit the depth of material modification. Proton is preferred to save acceleration voltage but the potential impact is low. We have investigated hydrogen molecular ions (H2+ and H3+) to compromise penetration depth and improve potential impact inside the material. These molecular ions are not easy to accelerate but have two or triple fold charges therefore they are especially suited to make big shallow structures. We can efficiently make the GTH (Groove and Thru-hole) structure combining them with Proton for deep structure.",

author = "Hidetaka Hayashi and Hiroyuki Nishikawa",

year = "2017",

month = jan,

day = "23",

doi = "10.1109/EGG.2016.7829876",

language = "English",

booktitle = "2016 Electronics Goes Green 2016+, EGG 2016",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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note = "2016 Electronics Goes Green 2016+, EGG 2016 ; Conference date: 06-09-2016 Through 09-09-2016",

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AU - Nishikawa, Hiroyuki

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N2 - The subject of this research is to find a process applicable to recycling FPC system adding extra functionality in the polymeric material without photo sensitive agent. We chose PBW (Proton Beam Writer) as an option. The potential impact by charge can modify electronic state and chemical bonding. Acceleration voltage and specific charge limit the depth of material modification. Proton is preferred to save acceleration voltage but the potential impact is low. We have investigated hydrogen molecular ions (H2+ and H3+) to compromise penetration depth and improve potential impact inside the material. These molecular ions are not easy to accelerate but have two or triple fold charges therefore they are especially suited to make big shallow structures. We can efficiently make the GTH (Groove and Thru-hole) structure combining them with Proton for deep structure.

AB - The subject of this research is to find a process applicable to recycling FPC system adding extra functionality in the polymeric material without photo sensitive agent. We chose PBW (Proton Beam Writer) as an option. The potential impact by charge can modify electronic state and chemical bonding. Acceleration voltage and specific charge limit the depth of material modification. Proton is preferred to save acceleration voltage but the potential impact is low. We have investigated hydrogen molecular ions (H2+ and H3+) to compromise penetration depth and improve potential impact inside the material. These molecular ions are not easy to accelerate but have two or triple fold charges therefore they are especially suited to make big shallow structures. We can efficiently make the GTH (Groove and Thru-hole) structure combining them with Proton for deep structure.

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M3 - Conference contribution

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ER -

PBW (Proton Beam Writer) application for EcoDesign of electronics

Abstract

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