Photoluminescence Study on Point Defects in SIMOX Buried SiO2 Film

K. S.Seol, A. Ieki, Y. Ohki, H. Nishikawa, M. Tachimori

Research output: Contribution to journal › Article › peer-review

Cite this

@article{c7187046391b474c89d9621eead28969,

title = "Photoluminescence Study on Point Defects in SIMOX Buried SiO2 Film",

author = "K. S.Seol and A. Ieki and Y. Ohki and H. Nishikawa and M. Tachimori",

year = "1995",

month = jan,

day = "1",

language = "English",

volume = "196-201",

pages = "1909--1914",

journal = "Materials Science Forum",

issn = "0255-5476",

publisher = "Trans Tech Publications",

}