Abstract
We have successfully developed novel processing equipment based on the combined of cavitation and plasma irradiation. This technique uses the strong points of the powerful ablation of cavitation as well as plasma irradiation. The novelty of the technique enable to process not only conductive material but also non-conductive material such as polymer, CFRP (carbon fiber reinforced plastic) and silicon, which is unlike conventional wire electric discharge machine. Also, the directional transportation of bubbles provides positioning accuracy of micro-processing. The structure of the plasma-cavitation pencil cutter is low cost and very simple structure. This technology contributes to effective processing of wide range of materials such as metal plate, polymer, carbon-fiber and biomaterials.
Original language | English |
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Title of host publication | 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 521-524 |
Number of pages | 4 |
ISBN (Print) | 9781479989553 |
DOIs | |
Publication status | Published - 2015 Aug 5 |
Event | 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States Duration: 2015 Jun 21 → 2015 Jun 25 |
Other
Other | 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 |
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Country/Territory | United States |
City | Anchorage |
Period | 15/6/21 → 15/6/25 |
Keywords
- Ablation
- Cavitation
- Plasma
- Processing
ASJC Scopus subject areas
- Instrumentation
- Electrical and Electronic Engineering