| Original language | English |
|---|---|
| Pages (from-to) | 125-128 |
| Journal | Proceddings of 6th SEATUC Conferece |
| Volume | 1 |
| Publication status | Published - 2012 Mar 6 |
Plasma diagnosis in etching and ashing of diamond like carbon coating
T. Aizawa, N.T. Redationo
Research output: Contribution to journal › Article › peer-review