Plasma etcing with metallic masking for micro-patterning onto DLC coated mold-die

N.T. Redationo, E.E. Yunata, Tatsuhiko Aizawa

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	19-20
Journal	Proceedings of 4th Asian workshop on nano/micro forming technology
Volume	1
Publication status	Published - 2011 Oct 27

Cite this

@article{e250d7c8242549d6b47c56bf97418a26,

title = "Plasma etcing with metallic masking for micro-patterning onto DLC coated mold-die",

author = "N.T. Redationo and E.E. Yunata and Tatsuhiko Aizawa",

year = "2011",

month = oct,

day = "27",

language = "English",

volume = "1",

pages = "19--20",

journal = "Proceedings of 4th Asian workshop on nano/micro forming technology",

}

TY - JOUR

T1 - Plasma etcing with metallic masking for micro-patterning onto DLC coated mold-die

AU - Redationo, N.T.

AU - Yunata, E.E.

AU - Aizawa, Tatsuhiko

PY - 2011/10/27

Y1 - 2011/10/27

M3 - Article

VL - 1

SP - 19

EP - 20

JO - Proceedings of 4th Asian workshop on nano/micro forming technology

JF - Proceedings of 4th Asian workshop on nano/micro forming technology

ER -