Position and size controlled fabrication of iron silicide nano-rods by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope

M. Tanaka; F. Chu; M. Shimojo; M. Takeguchi; K. Mitsuishi; K. Furuya

Position and size controlled fabrication of iron silicide nano-rods by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope

M. Tanaka, F. Chu, M. Shimojo, M. Takeguchi, K. Mitsuishi, K. Furuya

Functional Control Systems

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	5635-5638
Journal	Jpn. J. Appl. Phys
Volume	44
Publication status	Published - 2005 Jan 1

Cite this

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title = "Position and size controlled fabrication of iron silicide nano-rods by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope",

author = "M. Tanaka and F. Chu and M. Shimojo and M. Takeguchi and K. Mitsuishi and K. Furuya",

year = "2005",

month = jan,

day = "1",

language = "English",

volume = "44",

pages = "5635--5638",

journal = "Jpn. J. Appl. Phys",

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TY - JOUR

T1 - Position and size controlled fabrication of iron silicide nano-rods by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope

AU - Tanaka, M.

AU - Chu, F.

AU - Shimojo, M.

AU - Takeguchi, M.

AU - Mitsuishi, K.

AU - Furuya, K.

PY - 2005/1/1

Y1 - 2005/1/1

M3 - Article

VL - 44

SP - 5635

EP - 5638

JO - Jpn. J. Appl. Phys

JF - Jpn. J. Appl. Phys

ER -