Position and size controlled fabrication of nano-metals and semiconductors with fine focused electron beam

K. Furuya, K. Mitsuishi, M. Shimojo, M. Takeguchi

Research output: Contribution to journal › Article › peer-review

Cite this

@article{e6e2919beace4c728f89815fbca6f4b8,

title = "Position and size controlled fabrication of nano-metals and semiconductors with fine focused electron beam",

author = "K. Furuya and K. Mitsuishi and M. Shimojo and M. Takeguchi",

year = "2003",

month = jan,

day = "1",

language = "English",

volume = "5",

pages = "381--386",

journal = "Rev. Adv. Mater. Sci.",

}