Preparation and wear resistance of TiBC, TiBN, SiNx single layer film and TiBC-SiNx and TiBN-SiNx double layer film by thermal plasma CVD

Yusuke Fuji, Shiro Shimada, Hajime Kiyono

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science