Preparation and Wear Resistance of TiBC, TiBN, SiNx, Single layer Film and TiBC-SiNx and TiBN-SiNx Double Layer Film by Thermal Plasma CVD

Y. Fuji, S. Shimada, H. Kiyono

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	287-293
Journal	J. Jpn. Soc. Powder Powder Metallurgy
Volume	54
Publication status	Published - 2007 Jan 1

Cite this

@article{38075085535a4fe5a07740a76835d73b,

title = "Preparation and Wear Resistance of TiBC, TiBN, SiNx, Single layer Film and TiBC-SiNx and TiBN-SiNx Double Layer Film by Thermal Plasma CVD",

author = "Y. Fuji and S. Shimada and H. Kiyono",

year = "2007",

month = jan,

day = "1",

language = "English",

volume = "54",

pages = "287--293",

journal = "J. Jpn. Soc. Powder Powder Metallurgy",

}