TY - JOUR
T1 - Preparation of a stable silica membrane by a counter diffusion chemical vapor deposition method
AU - Nomura, Mikihiro
AU - Ono, Kenta
AU - Gopalakrishnan, Suraj
AU - Sugawara, Takashi
AU - Nakao, Shin Ichi
N1 - Funding Information:
The authors thank Prof. Tatsuya Okubo and Mr. Naotaka Chino for the measurements of temperature-programmed desorption mass spectrum of the silica membranes. This work has been supported by NEDO as a part of the R&D Project on Highly Efficient Ceramic Membranes for High-Temperature Separation of Hydrogen promoted by METI, Japan.
PY - 2005/4/1
Y1 - 2005/4/1
N2 - A stable silica membrane having excellent H2/N2 permeance ratio (over 1000) was prepared by the counter diffusion chemical vapor deposition method using tetramethyl orthosilicate (TMOS) and O2 as reactants at 873 K. TMOS and O2 were provided in the opposing geometry of the substrates, and silica layer was deposited in the substrate pores. Apparent activation energies through the silica membranes increased with increasing deposition temperatures. The activation energy of H2 was ca. 20 kJ mol-1 through the membrane. H2 permeance at 873 K permeation test was 1.5 ×10-7 mol m-2 s -1 Pa-1. H2/N2 permeance ratio was kept for 21 h under the typical steam-reforming conditions of methane for a membrane reactor (76 kPa of steam at 773 K).
AB - A stable silica membrane having excellent H2/N2 permeance ratio (over 1000) was prepared by the counter diffusion chemical vapor deposition method using tetramethyl orthosilicate (TMOS) and O2 as reactants at 873 K. TMOS and O2 were provided in the opposing geometry of the substrates, and silica layer was deposited in the substrate pores. Apparent activation energies through the silica membranes increased with increasing deposition temperatures. The activation energy of H2 was ca. 20 kJ mol-1 through the membrane. H2 permeance at 873 K permeation test was 1.5 ×10-7 mol m-2 s -1 Pa-1. H2/N2 permeance ratio was kept for 21 h under the typical steam-reforming conditions of methane for a membrane reactor (76 kPa of steam at 773 K).
KW - Counter diffusion CVD
KW - Hydrogen
KW - Silica membrane
KW - Steam stability
KW - Tetramethyl orthosilicate
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U2 - 10.1016/j.memsci.2004.11.008
DO - 10.1016/j.memsci.2004.11.008
M3 - Article
AN - SCOPUS:15244343867
SN - 0376-7388
VL - 251
SP - 151
EP - 158
JO - Journal of Membrane Science
JF - Journal of Membrane Science
IS - 1-2
ER -