Preparation of Silica Membranes by CVD Method

Research output: Chapter in Book/Report/Conference proceedingChapter

4 Citations (Scopus)


Amorphous silica is paid attention as a material for H 2 separation membranes because it shows diffusion selectivity of H 2 . Usually, the silica membrane is formed on a porous ceramic support in order to maintain the mechanical strength of the thin membrane. There are a sol-gel method and a chemical vapor deposition (CVD) method as a typical membrane preparation method. A silica sol is prepared by hydrolyzing a silica source such as a silicon alkoxide for the sol-gel method, and a porous ceramic substrate is coated with the solution to form a membrane. Here, we have paid attention to the CVD methods that the silica source is supplied by a vapor phase. A silica source is vaporized to deposit on a porous ceramic substrate. Silica membranes can be deposited on modules with complicated shape such as a multimembrane module because of the higher diffusivity of the vapor silica sources. The CVD method can be classified into two types, a one side geometry method and a counter-diffusion method.

Original languageEnglish
Title of host publicationCurrent Trends and Future Developments on (Bio-) Membranes
Subtitle of host publicationSilica Membranes: Preparation, Modelling, Application, and Commercialization
PublisherElsevier Inc.
Number of pages19
ISBN (Electronic)9780444638670
ISBN (Print)9780444638663
Publication statusPublished - 2017 Aug 12


  • Ceramic substrate
  • CVD
  • H permeance
  • Hydrothermal stability
  • Silica membrane
  • Silicon alkoxides

ASJC Scopus subject areas

  • Engineering(all)
  • Chemical Engineering(all)


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