Preparation of strain-included rutile titanium oxide thin films and influence of the strain upon optical properties

T. Nambara, K. Yoshida, L. Miao, S. Tanemura, N. Tanaka

Research output: Contribution to journalArticlepeer-review

21 Citations (Scopus)


Rutile type titanium dioxide (TiO2) thin films are prepared by pulse laser deposition (PLD) with controlled oxygen pressure. Transmission electron microscopy (TEM) analysis clarified that crystalline structures, surface structures and electric states of the TiO2 films almost correspond to those of the bulk rutile. We observed crystalline domain including strain in the PLD film. The strain of the TiO2 film was measured by nano-beam diffraction. The strain-included domains affected properties of the film as optical absorption. The obtained optical band gap energy value was 3.30 eV, which was larger than that of bulk. TEM results such as crystalline grain sizes and distribution were used to consider quantum size effect in order to explain the larger band gap value. Moreover the influence of strain in rutile crystalline grains upon optical properties was suggested in the present study. The difference of band gap energy between experimental and theoretically calculated ones was considered to come from the strain effects.

Original languageEnglish
Pages (from-to)3096-3101
Number of pages6
JournalThin Solid Films
Issue number5
Publication statusPublished - 2007 Jan 22
Externally publishedYes


  • Electon energy loss spectroscopy
  • Ellipsometry
  • Optical band gap
  • Pulse laser deposition
  • Scanning electron microscopy
  • Titanium oxide
  • Transmission electron microscopy

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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