Present Status and Prospect of Graphene Interconnect Applications

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Graphene has been expected as an alternative material for copper interconnects in which resistance increases and reliability deteriorates in nanoscale. While the principle advantages are verified by simulations and experiments, they have not been put into practical use due to the immaturity of the manufacturing process leading to mass production. On the other hand, recent steady progress in the fabrication process has increased the possibility of practical application. In this paper, I will review the recent advances and the latest prospects for conductor applications of graphene centered on interconnects. The possibility of further application utilizing the unique characteristics of graphene is discussed.

Original languageEnglish
Pages (from-to)572-577
Number of pages6
JournalIEICE Transactions on Electronics
Issue number10
Publication statusPublished - 2022 Oct


  • antenna
  • direct deposition
  • graphene
  • inductor
  • intercalation
  • multilevel interconnect
  • transparent electrode

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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