Proton beam writing micro fabrication system for micro chemical devices

Phi Nguyen Truong; Ryo Teshima; Tadahiro Hasegawa; Hiroyuki Nishikawa

doi:10.1109/MHS.2010.5669508

Proton beam writing micro fabrication system for micro chemical devices

Phi Nguyen Truong, Ryo Teshima, Tadahiro Hasegawa, Hiroyuki Nishikawa

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The authors have been developing a flexible micro fabrication system using Proton Beam Writing (PBW) for micro chemical devices. The system enable to fabricate the various kind of shape in XY stage, increase the productivity and meet the requirement of fabricate in the centimeter ranger. The flexible system transforms licensed 3D CAD (Computer Aided Design) data to pattern data that is used to control the XY stage of the PBW system. The experimental results showed a brightly future of proton beam in micro fabrication.

Original language	English
Title of host publication	2010 International Symposium on Micro-NanoMechatronics and Human Science
Subtitle of host publication	From Micro and Nano Scale Systems to Robotics and Mechatronics Systems, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010
Pages	435-440
Number of pages	6
DOIs	https://doi.org/10.1109/MHS.2010.5669508
Publication status	Published - 2010 Dec 1
Event	21st Annual Symposium on Micro-Nano Mechatronics and Human Science, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010 - Nagoya, Japan Duration: 2010 Nov 7 → 2010 Nov 10

Publication series

Name	2010 International Symposium on Micro-NanoMechatronics and Human Science: From Micro and Nano Scale Systems to Robotics and Mechatronics Systems, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010

Conference

Conference	21st Annual Symposium on Micro-Nano Mechatronics and Human Science, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010
Country/Territory	Japan
City	Nagoya
Period	10/11/7 → 10/11/10

ASJC Scopus subject areas

Electrical and Electronic Engineering
Mechanical Engineering

Access to Document

10.1109/MHS.2010.5669508

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Truong, P. N., Teshima, R., Hasegawa, T., & Nishikawa, H. (2010). Proton beam writing micro fabrication system for micro chemical devices. In 2010 International Symposium on Micro-NanoMechatronics and Human Science: From Micro and Nano Scale Systems to Robotics and Mechatronics Systems, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010 (pp. 435-440). [5669508] (2010 International Symposium on Micro-NanoMechatronics and Human Science: From Micro and Nano Scale Systems to Robotics and Mechatronics Systems, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010). https://doi.org/10.1109/MHS.2010.5669508

Proton beam writing micro fabrication system for micro chemical devices. / Truong, Phi Nguyen; Teshima, Ryo; Hasegawa, Tadahiro et al.
2010 International Symposium on Micro-NanoMechatronics and Human Science: From Micro and Nano Scale Systems to Robotics and Mechatronics Systems, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010. 2010. p. 435-440 5669508 (2010 International Symposium on Micro-NanoMechatronics and Human Science: From Micro and Nano Scale Systems to Robotics and Mechatronics Systems, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Truong, PN, Teshima, R, Hasegawa, T & Nishikawa, H 2010, Proton beam writing micro fabrication system for micro chemical devices. in 2010 International Symposium on Micro-NanoMechatronics and Human Science: From Micro and Nano Scale Systems to Robotics and Mechatronics Systems, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010., 5669508, 2010 International Symposium on Micro-NanoMechatronics and Human Science: From Micro and Nano Scale Systems to Robotics and Mechatronics Systems, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010, pp. 435-440, 21st Annual Symposium on Micro-Nano Mechatronics and Human Science, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010, Nagoya, Japan, 10/11/7. https://doi.org/10.1109/MHS.2010.5669508

Truong PN, Teshima R, Hasegawa T , Nishikawa H. Proton beam writing micro fabrication system for micro chemical devices. In 2010 International Symposium on Micro-NanoMechatronics and Human Science: From Micro and Nano Scale Systems to Robotics and Mechatronics Systems, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010. 2010. p. 435-440. 5669508. (2010 International Symposium on Micro-NanoMechatronics and Human Science: From Micro and Nano Scale Systems to Robotics and Mechatronics Systems, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010). doi: 10.1109/MHS.2010.5669508

Truong, Phi Nguyen ; Teshima, Ryo ; Hasegawa, Tadahiro et al. / Proton beam writing micro fabrication system for micro chemical devices. 2010 International Symposium on Micro-NanoMechatronics and Human Science: From Micro and Nano Scale Systems to Robotics and Mechatronics Systems, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010. 2010. pp. 435-440 (2010 International Symposium on Micro-NanoMechatronics and Human Science: From Micro and Nano Scale Systems to Robotics and Mechatronics Systems, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010).

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Proton beam writing micro fabrication system for micro chemical devices

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