TY - JOUR
T1 - Pulse-by-pulse optical observation of laser-irradiated thin glass substrate using oil-immersion microscopy
AU - Yanagisawa, Yuta
AU - Matsuo, Shigeki
N1 - Publisher Copyright:
© 2021 The Author(s). Published on behalf of The Japan Society of Applied Physics by IOP Publishing Ltd.
PY - 2022/1
Y1 - 2022/1
N2 - To study the formation mechanism of laser-induced periodic surface structures, we carried out a pulse-by-pulse optical observation of laser-induced surface morphological changes on thin glass substrates. We adopted oil-immersion microscopy, which has a higher spatial resolution than dry microscopy, and the laser was irradiated from the air side. A thin transparent substrate of coverslip was used as the sample. When a scratched coverslip was irradiated with focused subnanosecond laser pulses of 1.064 μm wavelength, periodic structures occasionally appeared in the flat region near the focus, with a period of about 0.55 μm.
AB - To study the formation mechanism of laser-induced periodic surface structures, we carried out a pulse-by-pulse optical observation of laser-induced surface morphological changes on thin glass substrates. We adopted oil-immersion microscopy, which has a higher spatial resolution than dry microscopy, and the laser was irradiated from the air side. A thin transparent substrate of coverslip was used as the sample. When a scratched coverslip was irradiated with focused subnanosecond laser pulses of 1.064 μm wavelength, periodic structures occasionally appeared in the flat region near the focus, with a period of about 0.55 μm.
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U2 - 10.35848/1347-4065/ac4034
DO - 10.35848/1347-4065/ac4034
M3 - Article
AN - SCOPUS:85123455557
SN - 0021-4922
VL - 61
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - 1
M1 - 010901
ER -