Recent Progress in Graphene Processes for Metallization and RF Applications

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Research on graphene processes for the applications to interconnects and electrodes, such as graphene caps, direct deposition of multi-layer graphene, and stable intercalation doping, is steadily progressing. Furthermore, attention will be paid to the application of graphene, which has a high kinetic inductance, to RF devices. Here, I will give an overview of recent research trends toward the practical application of graphene and discuss the issues.

Original languageEnglish
Title of host publication2022 IEEE International Interconnect Technology Conference, IITC 2022
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages37-39
Number of pages3
ISBN (Electronic)9781665486460
DOIs
Publication statusPublished - 2022
Event2022 IEEE International Interconnect Technology Conference, IITC 2022 - San Jose, United States
Duration: 2022 Jun 272022 Jun 30

Publication series

Name2022 IEEE International Interconnect Technology Conference, IITC 2022

Conference

Conference2022 IEEE International Interconnect Technology Conference, IITC 2022
Country/TerritoryUnited States
CitySan Jose
Period22/6/2722/6/30

Keywords

  • CVD
  • cap
  • graphene
  • inductor
  • intercalation doping
  • interconnect
  • kinetic inductance
  • solid-phase deposition

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Safety, Risk, Reliability and Quality
  • Electronic, Optical and Magnetic Materials

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