Abstract
Alumina electrostatic chucks having various electrical resistivities were fabricated by changing the amount of TiO2and heat treatment conditions. Experimental data on electrostatic force and its response time were obtained for the fabricated electrostatic chucks. The experimental results are compared with the theoretically predicted results utilizing the equivalent circuit model, and the relationship between electrical resistivity and electrostatic force characteristics is discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 864-871 |
| Number of pages | 8 |
| Journal | Japanese Journal of Applied Physics |
| Volume | 32 |
| Issue number | 8 R |
| DOIs | |
| Publication status | Published - 1993 Feb |
| Externally published | Yes |
Keywords
- Alumina
- Electrostatic chuck
- Electrostatic force
- Residual electrostatic force
- Response time
- Titanium oxide
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)