| Original language | English |
|---|---|
| Journal | 2004 MRS Spring Meeting |
| Publication status | Published - 2004 Apr 1 |
Retarded Growth of Sputtered HfO2 Films on Germanium
K. Kita, M. Sasagawa, M. Toyama, K. Kyuno, A. Toriumi
Research output: Contribution to journal › Article › peer-review