Selective growth and characterization of nanostructures with transmission electron microscopes

M. Shimojo; S. Bysakh; K. Mitsuishi; M. Tanaka; M. Song; K. Furuya

doi:10.1016/j.apsusc.2004.09.016

Selective growth and characterization of nanostructures with transmission electron microscopes

M. Shimojo, S. Bysakh, K. Mitsuishi, M. Tanaka, M. Song, K. Furuya

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

A new type of electron beam-induced reactions is reported. Focused electron beams, the probe size of which is about 0.8 nm, were irradiated on carbon and Si substrates with an introduction of an aluminum trichloride or a gold trichloride gas in the chamber. Nanometer-sized carbon and Si rods were formed using carbon and Si substrates, respectively, by moving the beam position at a certain speed. As no aluminum, gold or chlorine was found in the rods, it is considered that chloride gases behaved as a sort of catalysis.

Original language	English
Pages (from-to)	56-60
Number of pages	5
Journal	Applied Surface Science
Volume	241
Issue number	1-2 SPEC. ISS.
DOIs	https://doi.org/10.1016/j.apsusc.2004.09.016
Publication status	Published - 2005 Feb 28
Externally published	Yes

Keywords

Aluminum trichloride
Catalysis
Electron beam-induced reaction
Nano-fabrication

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Physics and Astronomy(all)
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1016/j.apsusc.2004.09.016

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abstract = "A new type of electron beam-induced reactions is reported. Focused electron beams, the probe size of which is about 0.8 nm, were irradiated on carbon and Si substrates with an introduction of an aluminum trichloride or a gold trichloride gas in the chamber. Nanometer-sized carbon and Si rods were formed using carbon and Si substrates, respectively, by moving the beam position at a certain speed. As no aluminum, gold or chlorine was found in the rods, it is considered that chloride gases behaved as a sort of catalysis.",

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author = "M. Shimojo and S. Bysakh and K. Mitsuishi and M. Tanaka and M. Song and K. Furuya",

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T1 - Selective growth and characterization of nanostructures with transmission electron microscopes

AU - Shimojo, M.

AU - Bysakh, S.

AU - Mitsuishi, K.

AU - Tanaka, M.

AU - Song, M.

AU - Furuya, K.

PY - 2005/2/28

Y1 - 2005/2/28

N2 - A new type of electron beam-induced reactions is reported. Focused electron beams, the probe size of which is about 0.8 nm, were irradiated on carbon and Si substrates with an introduction of an aluminum trichloride or a gold trichloride gas in the chamber. Nanometer-sized carbon and Si rods were formed using carbon and Si substrates, respectively, by moving the beam position at a certain speed. As no aluminum, gold or chlorine was found in the rods, it is considered that chloride gases behaved as a sort of catalysis.

AB - A new type of electron beam-induced reactions is reported. Focused electron beams, the probe size of which is about 0.8 nm, were irradiated on carbon and Si substrates with an introduction of an aluminum trichloride or a gold trichloride gas in the chamber. Nanometer-sized carbon and Si rods were formed using carbon and Si substrates, respectively, by moving the beam position at a certain speed. As no aluminum, gold or chlorine was found in the rods, it is considered that chloride gases behaved as a sort of catalysis.

KW - Aluminum trichloride

KW - Catalysis

KW - Electron beam-induced reaction

KW - Nano-fabrication

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DO - 10.1016/j.apsusc.2004.09.016

M3 - Article

AN - SCOPUS:12244256138

SN - 0169-4332

VL - 241

SP - 56

EP - 60

JO - Applied Surface Science

JF - Applied Surface Science

IS - 1-2 SPEC. ISS.

ER -

Selective growth and characterization of nanostructures with transmission electron microscopes

Abstract

Keywords

ASJC Scopus subject areas

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