Selective growth and characterization of nanostructures with transmission electron microscopes

M. Shimojo, S. Bysakh, K. Mitsuishi, M. Tanaka, M. Song, K. Furuya

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)


A new type of electron beam-induced reactions is reported. Focused electron beams, the probe size of which is about 0.8 nm, were irradiated on carbon and Si substrates with an introduction of an aluminum trichloride or a gold trichloride gas in the chamber. Nanometer-sized carbon and Si rods were formed using carbon and Si substrates, respectively, by moving the beam position at a certain speed. As no aluminum, gold or chlorine was found in the rods, it is considered that chloride gases behaved as a sort of catalysis.

Original languageEnglish
Pages (from-to)56-60
Number of pages5
JournalApplied Surface Science
Issue number1-2 SPEC. ISS.
Publication statusPublished - 2005 Feb 28
Externally publishedYes


  • Aluminum trichloride
  • Catalysis
  • Electron beam-induced reaction
  • Nano-fabrication

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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