Selective oxidation and successive wet etching for freestanding structure of magneto-optic waveguide

Hideki Yokoi; Y. Shoji; T. Mizumoto

doi:10.1109/OMEMS.2003.1233474

Selective oxidation and successive wet etching for freestanding structure of magneto-optic waveguide

Hideki Yokoi, Y. Shoji, T. Mizumoto

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A magneto-optic waveguide with a semiconductor guiding layer was studied for an optical isolator employing a nonreciprocal phase shift. Freestanding structure of the waveguide was obtained by selective oxidation and successive wet etching.

Original language	English
Title of host publication	2003 IEEE/LEOS International Conference on Optical MEMS
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	75-76
Number of pages	2
ISBN (Print)	078037830X, 9780780378308
DOIs	https://doi.org/10.1109/OMEMS.2003.1233474
Publication status	Published - 2003
Externally published	Yes
Event	2003 IEEE/LEOS International Conference on Optical MEMS - Waikoloa, United States Duration: 2003 Aug 18 → 2003 Aug 21

Other

Other	2003 IEEE/LEOS International Conference on Optical MEMS
Country/Territory	United States
City	Waikoloa
Period	03/8/18 → 03/8/21

Keywords

Electromagnetic waveguides
Isolators
Magnetooptic effects
Optical interferometry
Optical refraction
Optical surface waves
Optical variables control
Optical waveguides
Oxidation
Wet etching

ASJC Scopus subject areas

Engineering(all)

Access to Document

10.1109/OMEMS.2003.1233474

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Yokoi, H, Shoji, Y & Mizumoto, T 2003, Selective oxidation and successive wet etching for freestanding structure of magneto-optic waveguide. in 2003 IEEE/LEOS International Conference on Optical MEMS., 1233474, Institute of Electrical and Electronics Engineers Inc., pp. 75-76, 2003 IEEE/LEOS International Conference on Optical MEMS, Waikoloa, United States, 03/8/18. https://doi.org/10.1109/OMEMS.2003.1233474

@inproceedings{425ef644d8c9427fbab60403e0f4673a,

title = "Selective oxidation and successive wet etching for freestanding structure of magneto-optic waveguide",

abstract = "A magneto-optic waveguide with a semiconductor guiding layer was studied for an optical isolator employing a nonreciprocal phase shift. Freestanding structure of the waveguide was obtained by selective oxidation and successive wet etching.",

keywords = "Electromagnetic waveguides, Isolators, Magnetooptic effects, Optical interferometry, Optical refraction, Optical surface waves, Optical variables control, Optical waveguides, Oxidation, Wet etching",

author = "Hideki Yokoi and Y. Shoji and T. Mizumoto",

year = "2003",

doi = "10.1109/OMEMS.2003.1233474",

language = "English",

isbn = "078037830X",

pages = "75--76",

booktitle = "2003 IEEE/LEOS International Conference on Optical MEMS",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "2003 IEEE/LEOS International Conference on Optical MEMS ; Conference date: 18-08-2003 Through 21-08-2003",

}

TY - GEN

T1 - Selective oxidation and successive wet etching for freestanding structure of magneto-optic waveguide

AU - Yokoi, Hideki

AU - Shoji, Y.

AU - Mizumoto, T.

PY - 2003

Y1 - 2003

N2 - A magneto-optic waveguide with a semiconductor guiding layer was studied for an optical isolator employing a nonreciprocal phase shift. Freestanding structure of the waveguide was obtained by selective oxidation and successive wet etching.

AB - A magneto-optic waveguide with a semiconductor guiding layer was studied for an optical isolator employing a nonreciprocal phase shift. Freestanding structure of the waveguide was obtained by selective oxidation and successive wet etching.

KW - Electromagnetic waveguides

KW - Isolators

KW - Magnetooptic effects

KW - Optical interferometry

KW - Optical refraction

KW - Optical surface waves

KW - Optical variables control

KW - Optical waveguides

KW - Oxidation

KW - Wet etching

UR - http://www.scopus.com/inward/record.url?scp=84946234361&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84946234361&partnerID=8YFLogxK

U2 - 10.1109/OMEMS.2003.1233474

DO - 10.1109/OMEMS.2003.1233474

M3 - Conference contribution

AN - SCOPUS:84946234361

SN - 078037830X

SN - 9780780378308

SP - 75

EP - 76

BT - 2003 IEEE/LEOS International Conference on Optical MEMS

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2003 IEEE/LEOS International Conference on Optical MEMS

Y2 - 18 August 2003 through 21 August 2003

ER -

Selective oxidation and successive wet etching for freestanding structure of magneto-optic waveguide

Abstract

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Keywords

ASJC Scopus subject areas

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