Simulation, fabrication and evaluation of microinductor-based artificial tactile mechanoreceptor embedded in PDMS

Nobuyuki Futai; Kiyoshi Matsumoto; Isao Shimoyama

Simulation, fabrication and evaluation of microinductor-based artificial tactile mechanoreceptor embedded in PDMS

Nobuyuki Futai, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Contribution to conference › Paper › peer-review

Abstract

A micromachined planar spiral inductor was created for the use of a passive mechanoreceptor element in a practical skin-like tactile sensor. The first version of the element was previously reported [1]. This paper shows the results of a simulation of the receptor element that changes inductance when largely deformed. We also report a modified method of fabrication and improves durability dramatically. Finally, we evaluated the validation of the simulation method.

Original language	English
Pages	206-209
Number of pages	4
Publication status	Published - 2003
Externally published	Yes
Event	IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan Duration: 2003 Jan 19 → 2003 Jan 23

Conference

Conference	IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems
Country/Territory	Japan
City	Kyoto
Period	03/1/19 → 03/1/23

ASJC Scopus subject areas

Control and Systems Engineering
Mechanical Engineering
Electrical and Electronic Engineering

Cite this

Simulation, fabrication and evaluation of microinductor-based artificial tactile mechanoreceptor embedded in PDMS. / Futai, Nobuyuki; Matsumoto, Kiyoshi; Shimoyama, Isao.

2003. 206-209 Paper presented at IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems, Kyoto, Japan.

Research output: Contribution to conference › Paper › peer-review

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abstract = "A micromachined planar spiral inductor was created for the use of a passive mechanoreceptor element in a practical skin-like tactile sensor. The first version of the element was previously reported [1]. This paper shows the results of a simulation of the receptor element that changes inductance when largely deformed. We also report a modified method of fabrication and improves durability dramatically. Finally, we evaluated the validation of the simulation method.",

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AU - Shimoyama, Isao

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Y1 - 2003

N2 - A micromachined planar spiral inductor was created for the use of a passive mechanoreceptor element in a practical skin-like tactile sensor. The first version of the element was previously reported [1]. This paper shows the results of a simulation of the receptor element that changes inductance when largely deformed. We also report a modified method of fabrication and improves durability dramatically. Finally, we evaluated the validation of the simulation method.

AB - A micromachined planar spiral inductor was created for the use of a passive mechanoreceptor element in a practical skin-like tactile sensor. The first version of the element was previously reported [1]. This paper shows the results of a simulation of the receptor element that changes inductance when largely deformed. We also report a modified method of fabrication and improves durability dramatically. Finally, we evaluated the validation of the simulation method.

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M3 - Paper

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T2 - IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems

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Simulation, fabrication and evaluation of microinductor-based artificial tactile mechanoreceptor embedded in PDMS

Abstract

Conference

ASJC Scopus subject areas

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