TY - GEN
T1 - SMA micro pump chip to flow liquids and gases
AU - Ikuta, Koji
AU - Hasegawa, Tadahiro
AU - Adachi, Takao
PY - 2008/12/1
Y1 - 2008/12/1
N2 - This paper describes SMA micro pump chip with high performance. This chip can flow not only liquids but also gases (12μl/min., 25kPa for water, 11μl/min., 5kPa for air). Moreover, the micro pump is tolerant of gas bubbles in the liquid chamber and it is possible to prime by itself. To achieve this performance, the micro pump improved three elements. The first one is eliminating pressure loss of the check valves. The second one is optimizing flow pattern inside the deformable chamber. And the third one is increasing compressibility of the deformable chamber. The micro pump chip was fabricated using our original method of hybrid micro stereo lithography (hybrid-IH process). Therefore, their packaging without leakage was made successfully.
AB - This paper describes SMA micro pump chip with high performance. This chip can flow not only liquids but also gases (12μl/min., 25kPa for water, 11μl/min., 5kPa for air). Moreover, the micro pump is tolerant of gas bubbles in the liquid chamber and it is possible to prime by itself. To achieve this performance, the micro pump improved three elements. The first one is eliminating pressure loss of the check valves. The second one is optimizing flow pattern inside the deformable chamber. And the third one is increasing compressibility of the deformable chamber. The micro pump chip was fabricated using our original method of hybrid micro stereo lithography (hybrid-IH process). Therefore, their packaging without leakage was made successfully.
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U2 - 10.1361/cp2007sms343
DO - 10.1361/cp2007sms343
M3 - Conference contribution
AN - SCOPUS:65649147931
SN - 9780871707222
T3 - SMST-2007 - Proceedings of the International Conference on Shape Memory and Superelastic Technologies
SP - 343
EP - 350
BT - SMST-2007 - Proceedings of the International Conference on Shape Memory and Superelastic Technologies
T2 - International Conference on Shape Memory and Superelastic Technologies, SMST-2007
Y2 - 2 December 2007 through 5 December 2007
ER -