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Soft-lithographic methods for the fabrication of dielectrophoretic devices using molds by proton beam writing
Y. Shiine, H. Nishikawa, Y. Furuta, K. Kanamitsu, T. Satoh, Y. Ishii, T. Kamiya, R. Nakao, S. Uchida
Research output: Contribution to journal › Article › peer-review
8
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(Scopus)