TY - JOUR
T1 - Spatial distribution of irradiation effects on silica glass induced by 15-MeV oxygen ion microbeam
AU - Nishikawa, H.
AU - Fukagawa, K.
AU - Nakamura, T.
AU - Ohki, Y.
AU - Oikawa, M.
AU - Kamiya, T.
AU - Arakawa, K.
N1 - Funding Information:
This work was performed under the JAERI-Cooperation Research Program at TIARA. It was partly supported by a Grant-in-Aid for Scientific Research from Japan Society for the Promotion of Science (no. 15510112).
PY - 2006/1
Y1 - 2006/1
N2 - High-purity silica glass was irradiated by a focused 15-MeV O4+ microbeam with diameter of 1 μm up to a fluence of 1.0 × 10 14 ions/cm2. Spatial distribution of irradiation effects by the O4+ microbeam on silica glass was investigated by optical microscopy, microphotoluminescence (PL)/Raman spectroscopy and atomic force microscopy (AFM). Distribution of refractive index change and defect formation was visualized by optical microscopy and PL mapping, indicating the structural changes of silica glass along the ion track up to the depth of 10 μm. In addition, we observed deformed side surface with a groove by AFM along the track suggesting the internal compaction in silica glass. This is accompanied by increased threefold rings of SiO2 network detected by Raman scattering. We also discuss technological implications of these results on the applications of microbeam irradiation effects to the fabrication of microoptical elements.
AB - High-purity silica glass was irradiated by a focused 15-MeV O4+ microbeam with diameter of 1 μm up to a fluence of 1.0 × 10 14 ions/cm2. Spatial distribution of irradiation effects by the O4+ microbeam on silica glass was investigated by optical microscopy, microphotoluminescence (PL)/Raman spectroscopy and atomic force microscopy (AFM). Distribution of refractive index change and defect formation was visualized by optical microscopy and PL mapping, indicating the structural changes of silica glass along the ion track up to the depth of 10 μm. In addition, we observed deformed side surface with a groove by AFM along the track suggesting the internal compaction in silica glass. This is accompanied by increased threefold rings of SiO2 network detected by Raman scattering. We also discuss technological implications of these results on the applications of microbeam irradiation effects to the fabrication of microoptical elements.
KW - Atomic force microscopy
KW - Ion microbeam
KW - Photoluminescence
KW - Raman scattering
KW - Silica
UR - http://www.scopus.com/inward/record.url?scp=28544434407&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=28544434407&partnerID=8YFLogxK
U2 - 10.1016/j.nimb.2005.08.069
DO - 10.1016/j.nimb.2005.08.069
M3 - Article
AN - SCOPUS:28544434407
SN - 0168-583X
VL - 242
SP - 437
EP - 440
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
IS - 1-2
ER -