Sputter epitaxy of Pb(Zr, Ti)O3 and Pb(Mg1/3, Nb2/3)O3-PbTiO3 Thin Films on Si for high-performance Piezoelectric MEMS

Shinya Yoshida; Shuji Tanaka

Sputter epitaxy of Pb(Zr, Ti)O₃ and Pb(Mg_1/3, Nb_2/3)O₃-PbTiO₃ Thin Films on Si for high-performance Piezoelectric MEMS

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Smart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems
Editors	Thomas Otto
Publisher	Mesago Messe Frankfurt GmbH
Pages	233-239
Number of pages	7
ISBN (Print)	9783957350824
Publication status	Published - 2018
Externally published	Yes
Event	Smart Systems Integration 2018 - 12th International Conference and Exhibition on Integration Issues of Miniaturized Systems - Dresden, Germany Duration: 2018 Apr 11 → 2018 Apr 12

Publication series

Name	Smart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems

Conference

Conference	Smart Systems Integration 2018 - 12th International Conference and Exhibition on Integration Issues of Miniaturized Systems
Country/Territory	Germany
City	Dresden
Period	18/4/11 → 18/4/12

ASJC Scopus subject areas

Computer Science Applications
Computer Networks and Communications
Artificial Intelligence

Cite this

Yoshida, S., & Tanaka, S. (2018). Sputter epitaxy of Pb(Zr, Ti)O₃ and Pb(Mg_1/3, Nb_2/3)O₃-PbTiO₃ Thin Films on Si for high-performance Piezoelectric MEMS. In T. Otto (Ed.), Smart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems (pp. 233-239). (Smart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems). Mesago Messe Frankfurt GmbH.

Sputter epitaxy of Pb(Zr, Ti)O₃ and Pb(Mg_1/3, Nb_2/3)O₃-PbTiO₃ Thin Films on Si for high-performance Piezoelectric MEMS. / Yoshida, Shinya; Tanaka, Shuji.

Smart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems. ed. / Thomas Otto. Mesago Messe Frankfurt GmbH, 2018. p. 233-239 (Smart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Yoshida, S & Tanaka, S 2018, Sputter epitaxy of Pb(Zr, Ti)O₃ and Pb(Mg_1/3, Nb_2/3)O₃-PbTiO₃ Thin Films on Si for high-performance Piezoelectric MEMS. in T Otto (ed.), Smart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems. Smart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, Mesago Messe Frankfurt GmbH, pp. 233-239, Smart Systems Integration 2018 - 12th International Conference and Exhibition on Integration Issues of Miniaturized Systems, Dresden, Germany, 18/4/11.

Yoshida S, Tanaka S. Sputter epitaxy of Pb(Zr, Ti)O₃ and Pb(Mg_1/3, Nb_2/3)O₃-PbTiO₃ Thin Films on Si for high-performance Piezoelectric MEMS. In Otto T, editor, Smart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems. Mesago Messe Frankfurt GmbH. 2018. p. 233-239. (Smart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems).

Yoshida, Shinya ; Tanaka, Shuji. / Sputter epitaxy of Pb(Zr, Ti)O₃ and Pb(Mg_1/3, Nb_2/3)O₃-PbTiO₃ Thin Films on Si for high-performance Piezoelectric MEMS. Smart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems. editor / Thomas Otto. Mesago Messe Frankfurt GmbH, 2018. pp. 233-239 (Smart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems).

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author = "Shinya Yoshida and Shuji Tanaka",

note = "Funding Information: This work was partly supported by JSPS KAKENHI−Grant Number 16K17500 and the Asahi Glass Foundation. This work was also supported by the “Nanotechnology Platform” of the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan, at the Center for Integrated Nanotechnology Support, Tohoku University.; Smart Systems Integration 2018 - 12th International Conference and Exhibition on Integration Issues of Miniaturized Systems ; Conference date: 11-04-2018 Through 12-04-2018",

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