TY - JOUR
T1 - Subnanosecond-laser-induced periodic surface structures on prescratched silicon substrate
AU - Hongo, Motoharu
AU - Matsuo, Shigeki
N1 - Publisher Copyright:
© 2016 The Japan Society of Applied Physics.
PY - 2016/6
Y1 - 2016/6
N2 - Laser-induced periodic surface structures (LIPSS) were fabricated on a prescratched silicon surface by irradiation with subnanosecond laser pulses. Low-spatial-frequency LIPSS (LSFL) were observed in the central and peripheral regions; both had a period Λ close to the laser wavelength λ, and the wavevector orientation was parallel to the electric field of the laser beam. The LSFL in the peripheral region seemed to be growing, that is, expanding in length with increasing number of pulses, into the outer regions. In addition, high-spatial-frequency LIPSS, λ ≲ λ =2, were found along the scratches, and their wavevector orientation was parallel to the scratches.
AB - Laser-induced periodic surface structures (LIPSS) were fabricated on a prescratched silicon surface by irradiation with subnanosecond laser pulses. Low-spatial-frequency LIPSS (LSFL) were observed in the central and peripheral regions; both had a period Λ close to the laser wavelength λ, and the wavevector orientation was parallel to the electric field of the laser beam. The LSFL in the peripheral region seemed to be growing, that is, expanding in length with increasing number of pulses, into the outer regions. In addition, high-spatial-frequency LIPSS, λ ≲ λ =2, were found along the scratches, and their wavevector orientation was parallel to the scratches.
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U2 - 10.7567/APEX.9.062703
DO - 10.7567/APEX.9.062703
M3 - Article
AN - SCOPUS:84973457886
SN - 1882-0778
VL - 9
JO - Applied Physics Express
JF - Applied Physics Express
IS - 6
M1 - 062703
ER -