Surface Micromachining in Optical Isolator with Semiconductor Guiding Layer for Enhancement of Magnetooptic Effect

Hideki Yokoi; Tetsuya Mizumoto; Takashi Sakai; Takafumi Ohtsuka; Yoshiaki Nakano

doi:10.1143/jjap.42.5094

Surface Micromachining in Optical Isolator with Semiconductor Guiding Layer for Enhancement of Magnetooptic Effect

Hideki Yokoi, Tetsuya Mizumoto, Takashi Sakai, Takafumi Ohtsuka, Yoshiaki Nakano

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

A magnetooptic waveguide with a magnetic garnet/GaInAsP/air structure was effective in enhancing the magnetooptic effect. Surface micromachining was investigated for fabricating a magnetooptic waveguide in an optical isolator with a semiconductor guiding layer. As a preliminary experiment, a GaInAsP rib waveguide with an air cladding layer was fabricated by selective wet etching. The rib waveguide with a 1 -mm-long air bridge was successfully obtained on the GaInAsP guiding layer. Light waves could be guided in the GaInAsP waveguide with the air bridge structure.

Original language	English
Pages (from-to)	5094-5097
Number of pages	4
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	42
Issue number	8
DOIs	https://doi.org/10.1143/jjap.42.5094
Publication status	Published - 2003 Aug
Externally published	Yes

Keywords

Air bridge
Magnetic gamet
Magnetooptic effect
Optical isolator
Surface micromachining

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/jjap.42.5094

Cite this

Surface Micromachining in Optical Isolator with Semiconductor Guiding Layer for Enhancement of Magnetooptic Effect. / Yokoi, Hideki; Mizumoto, Tetsuya; Sakai, Takashi et al.
In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 42, No. 8, 08.2003, p. 5094-5097.

Research output: Contribution to journal › Article › peer-review

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title = "Surface Micromachining in Optical Isolator with Semiconductor Guiding Layer for Enhancement of Magnetooptic Effect",

abstract = "A magnetooptic waveguide with a magnetic garnet/GaInAsP/air structure was effective in enhancing the magnetooptic effect. Surface micromachining was investigated for fabricating a magnetooptic waveguide in an optical isolator with a semiconductor guiding layer. As a preliminary experiment, a GaInAsP rib waveguide with an air cladding layer was fabricated by selective wet etching. The rib waveguide with a 1 -mm-long air bridge was successfully obtained on the GaInAsP guiding layer. Light waves could be guided in the GaInAsP waveguide with the air bridge structure.",

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AU - Sakai, Takashi

AU - Ohtsuka, Takafumi

AU - Nakano, Yoshiaki

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AB - A magnetooptic waveguide with a magnetic garnet/GaInAsP/air structure was effective in enhancing the magnetooptic effect. Surface micromachining was investigated for fabricating a magnetooptic waveguide in an optical isolator with a semiconductor guiding layer. As a preliminary experiment, a GaInAsP rib waveguide with an air cladding layer was fabricated by selective wet etching. The rib waveguide with a 1 -mm-long air bridge was successfully obtained on the GaInAsP guiding layer. Light waves could be guided in the GaInAsP waveguide with the air bridge structure.

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KW - Magnetic gamet

KW - Magnetooptic effect

KW - Optical isolator

KW - Surface micromachining

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Surface Micromachining in Optical Isolator with Semiconductor Guiding Layer for Enhancement of Magnetooptic Effect

Abstract

Keywords

ASJC Scopus subject areas

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