TEM sample preparation using a new nanofabrication technique combining electron beam induced deposition and low energy ion milling

K. Mitsuishi, M. Shimojo, M. Tanaka, M. Takeguchi, M. Song, K. Furuya

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)545-548
JournalMicrosc. Microanal
Publication statusPublished - 2006 Jan 1

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