Fingerprint
Dive into the research topics of 'The design and experiment of ion generator power supply for vacuum sputtering'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
The design and experiment of ion generator power supply for vacuum sputtering
Wen Guang Chen, Yi Hua Rao, Chang Hong Shan, Goro Fujita, Takemoto Yasutoshi
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
9
Citations
(Scopus)