Original language | English |
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Pages (from-to) | 916-919 |
Journal | The 11th International Conference on Solid-State Sensors and Actuators |
Publication status | Published - 2001 Jun 1 |
The optimized SMA micro pump chip applicable to liquids and gases
K.Ikuta K.Ikuta, T.Hasegawa T.Hasegawa, Takao Adachi, Tadahiro Hasegawa
Research output: Contribution to journal › Article › peer-review