The size dependence of the nano-dots formed by electron-beam-induced deposition on the partial pressure of the precursor

M. Tanaka; M. Shimojo; K. Mitsuishi; K. Furuya

doi:10.1007/s00339-003-2394-z

The size dependence of the nano-dots formed by electron-beam-induced deposition on the partial pressure of the precursor

M. Tanaka, M. Shimojo, K. Mitsuishi, K. Furuya

Research output: Contribution to journal › Article › peer-review

54 Citations (Scopus)

Abstract

We have successfully fabricated nano-dots containing W from a metal-organic gas source by electron-beam-induced deposition in an ultra-high vacuum transmission electron microscope. The size of the dots can be controlled by changing the time for irradiation and the partial pressure of the precursor. The smallest particle size is less than 2 nm in diameter, which is the record smallest ever made by this method.

Original language	English
Pages (from-to)	543-546
Number of pages	4
Journal	Applied Physics A: Materials Science and Processing
Volume	78
Issue number	4
DOIs	https://doi.org/10.1007/s00339-003-2394-z
Publication status	Published - 2004 Mar
Externally published	Yes

ASJC Scopus subject areas

Chemistry(all)
Materials Science(all)

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10.1007/s00339-003-2394-z

Cite this

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abstract = "We have successfully fabricated nano-dots containing W from a metal-organic gas source by electron-beam-induced deposition in an ultra-high vacuum transmission electron microscope. The size of the dots can be controlled by changing the time for irradiation and the partial pressure of the precursor. The smallest particle size is less than 2 nm in diameter, which is the record smallest ever made by this method.",

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AU - Furuya, K.

PY - 2004/3

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AB - We have successfully fabricated nano-dots containing W from a metal-organic gas source by electron-beam-induced deposition in an ultra-high vacuum transmission electron microscope. The size of the dots can be controlled by changing the time for irradiation and the partial pressure of the precursor. The smallest particle size is less than 2 nm in diameter, which is the record smallest ever made by this method.

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The size dependence of the nano-dots formed by electron-beam-induced deposition on the partial pressure of the precursor

Abstract

ASJC Scopus subject areas

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