Thermal Analysis on Double-Crucible Method in Continuous Silicon CZ Technology I

Naoki Ono, Michio Kida, Yoshiaki Arai, Kensho Sahira

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	2101-2105
Journal	Journal of the Electrochemical Society
Volume	140
Publication status	Published - 1993 Jul 1

Cite this

@article{3f0b142424414c72b90e3177a3dd2454,

title = "Thermal Analysis on Double-Crucible Method in Continuous Silicon CZ Technology I",

author = "Naoki Ono and Michio Kida and Yoshiaki Arai and Kensho Sahira",

year = "1993",

month = jul,

day = "1",

language = "English",

volume = "140",

pages = "2101--2105",

journal = "Journal of the Electrochemical Society",

issn = "0013-4651",

publisher = "Electrochemical Society, Inc.",

}