Thermal Analysis on Double-Crucible Method in Continuous Silicon CZ Technology II

Naoki Ono, Micho Kida, Yoshiaki Arai, Kensho Sahira

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	2106-2111
Journal	Journal of the Electrochemical Society
Volume	140
Publication status	Published - 1993 Jul 1

Cite this

@article{a34af1d1b3814025939500f95fba0edc,

title = "Thermal Analysis on Double-Crucible Method in Continuous Silicon CZ Technology II",

author = "Naoki Ono and Micho Kida and Yoshiaki Arai and Kensho Sahira",

year = "1993",

month = jul,

day = "1",

language = "English",

volume = "140",

pages = "2106--2111",

journal = "Journal of the Electrochemical Society",

issn = "0013-4651",

publisher = "Electrochemical Society, Inc.",

}