| Original language | English |
|---|---|
| Pages (from-to) | 175-178 |
| Journal | Proceedings of PowerMEMS2010 |
| Publication status | Published - 2010 Dec 1 |
Three D Flexible Vibration Structure Design and Its Fabrication for Micro Energy Harvesting
Koei Takeda, Sumito Nagasawa, Hiroki Kuwano
Research output: Contribution to journal › Article › peer-review