Three-dimensional micro-channels in polymers: One-step fabrication

K. Yamasaki, S. Juodkazis, S. Matsuo, H. Misawa

Research output: Contribution to journalArticlepeer-review

68 Citations (Scopus)


We report on the femtosecond laser fabrication of micro-channels of sub-micrometer cross section recorded in polymethylmethacrylate (PMMA) films in a single processing step. Both axial lengths of an elliptical cross section smaller than 0.4 μm were achieved for a fabrication irradiance close to the dielectric breakdown of PMMA. Femtosecond pulsed irradiation was scanned along the three-dimensional (3D) patterns inside the film. Channels have a self-formed densified cladding and can be 3D stacked into any pre-designed pattern and can extend over a mm length. These features are prospective for micro-total analysis system (μ-TAS) chip fabrication, micro- or nano-fluidic studies, and photonic applications such as photonic crystals.

Original languageEnglish
Pages (from-to)371-373
Number of pages3
JournalApplied Physics A: Materials Science and Processing
Issue number3-4
Publication statusPublished - 2003 Aug
Externally publishedYes

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)


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