TY - GEN
T1 - Tribological properties of physical vapor deposited ZrN thin films
AU - Mitsuo, Atsushi
AU - Aizawa, Tatsuhiko
PY - 2003/12/1
Y1 - 2003/12/1
N2 - Zirconium nitride thin films were prepared by ion-beam assisted deposition (IBAD) on silicon substrates. The films were synthesized by depositing zirconium vapor simultaneous irradiation with nitrogen ions. Transport ratio of Zr to N was varied between 1.0 and 3.0, and N-ion beam energy was kept 0.5 and 1.0 keV. The films were characterized by X-ray diffraction and X-ray photoelectron spectroscopy. Hardness of the films was investigated with a nano-indentation tester. The films were tested for friction and wear on a ball-and-disk tribometer, under 5 N load and 10 mm/s relative sliding speed with steel balls as the counter material. The hardness of the films increased with decreasing the transport ratio. Tribological properties of films were compared with post chlorine-ion implanted films.
AB - Zirconium nitride thin films were prepared by ion-beam assisted deposition (IBAD) on silicon substrates. The films were synthesized by depositing zirconium vapor simultaneous irradiation with nitrogen ions. Transport ratio of Zr to N was varied between 1.0 and 3.0, and N-ion beam energy was kept 0.5 and 1.0 keV. The films were characterized by X-ray diffraction and X-ray photoelectron spectroscopy. Hardness of the films was investigated with a nano-indentation tester. The films were tested for friction and wear on a ball-and-disk tribometer, under 5 N load and 10 mm/s relative sliding speed with steel balls as the counter material. The hardness of the films increased with decreasing the transport ratio. Tribological properties of films were compared with post chlorine-ion implanted films.
KW - Chlorine ion implantation
KW - Friction coefficient
KW - Hardness
KW - Ion beam assisted deposition
KW - Zirconium nitride
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M3 - Conference contribution
AN - SCOPUS:11044221500
SN - 0871707810
SN - 9780871707819
T3 - International Surface Engineering Congress - Proceedings of the 1st Congress
SP - 127
EP - 130
BT - International Surface Engineering Congress - Proceedings of the 1st Congress
T2 - International Surface Engineering Congress - Proceedings of the 1st Congress
Y2 - 7 October 2002 through 10 October 2002
ER -